MEMS-Hyperspectral imaging sensor
Hypernano is the lead in mass production of the world's first movable mirror process hyperspectral imaging MEMS-FPI chip, which has the advantages of low power consumption, wide spectrum continuous tunable, high spatial resolution, fast speed (millisecond).
Hypernano have rich MEMS process development and MEMS standardized production process experience, master etching, coating, suspended, reflection and sealing cavity processing technology, can realize bulk process, surface process and bonding process and other different structure of FPI chip design and manufacturing, is a handful of domestic MEMS whole process production technology reserves of science and technology enterprises.